Polygon Physics 아이언 빔, 전자 빔 솔루션, TES, HEXAR, IE-GUN Our expertise is in the design and fabrication of ion & electron beam solutions based on ultracompact ECR plasma cavities. Multifunctional surface treatment systems Multi Beam Sputter Deposition Systems Custom beam solutions IE-GUN | ECR source for high energy beams HEXAR | Broad Beam ECR source TES | Single-cavity ECR-plasma based sources TES ..

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